Laser precession machining of cross-shaped terahertz bandpass filters
نویسندگان
چکیده
The laser micro-machining technology is an attractive alternative to conventional photoresist-based technologies for manufacturing terahertz (THz) cross-shaped mesh filters. It can address some limitations related filter's quality, process complexity, unit cost and available materials. However, there are also open issues associated with the that have be addressed. In particular, intrinsic characteristics of micro-machined structures, i.e. side-wall tapering, impact both achievable geometrical dimensional accuracy filters’ performance. This research proposes a novel fabrication process, called precession machining, addresses key in producing THz employs ultrafast “precess” module vary beam incident angle thus minimise taper on sidewalls through holes. A significant reduction this negative tapering effect was achieved micro-structures produced new method led improvement performance compared simulation results they were good agreement. X-ray photoelectron spectroscopy (XPS) analysis carried out analyze effects machining composition copper substrates as potential factor affecting
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ژورنال
عنوان ژورنال: Optics and Lasers in Engineering
سال: 2022
ISSN: ['1873-0302', '0143-8166']
DOI: https://doi.org/10.1016/j.optlaseng.2021.106790